The interferometer module is designed as a compact embedded system for real-time measurements. The source of radiation is a single-frequency stabilized HeNe-laser with 1 mW power (wavelength = 632.991084 nm, the relative instability of optical frequency during 8 hours of operation is less than 3.10-9
The main purpose is to determine metrological characteristics of other scanning probe microscopes, to ensure reliability of measurements of linear dimensions in the nanometer range in various technological areas, as well as in the tasks of certification and control of nanoindustry products.Modes and techniques:
- hardware and software compatibility with the universal measurement module "NanoScan-3D";
- Hardware and software compatibility with the atomic force microscope module "NanoScan-4D";
- construction of surface topography by scanning in the modes of scanning probe and atomic force microscopy.