NanoScan technology is based on principles of scanning probe microscopy (SPM). The main characteristic feature of NanoScan is the use of piezoceramic probe sensor with high bending stiffness of the cantilever (~2×10⁴ N/m).

The use of the regime of resonance oscillations allows to perform the tracking of contact between the probe tip and the surface on two parameters: change of amplitude and frequency of the cantilever oscillations. This makes it possible to separate the viscous and elastic components of the tip-surface interaction, and distinguish an elastic surface and a viscous contamination layer on it, as well as to measure the mechanical properties of the surface.

a) Piezoceramic probe sensor b) The image of indentation imprint

High bending stiffness of the cantilever permits to go through the viscous layer until the contact with rigid surface and to make a modification of surface (indentation and scratching). The probe design allows to use diamond indentors of different type. The listed functional capabilities give a great distinction between NanoScan and other nanoindenters and SPMs.