MODES

• Imaging
• Scratch hardness test
• Nanoindentation
• Force spectroscopy
• MEMS
• Thin films
• Microindentation
• Nanolithography

       

MEMS

Mechanical properties of MEMS

Schematics for measuring membrane properties.	Loading/unloading curve: membrane stiffness and flexure (a), membrane touching the substrate (b).

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