Beams and membranes
Beams and membranes hardness measurement
For controlling the beams and membranes mechanical parameters by scanning nanohardness tester NanoScan-3D, a load – displacement dependency measurement is applied, similar to the instrumented indentation method.* A mode of multiple cycles loading-unloading by the indenter is also implemented. Results of such test allow determining the stiffness (compliance) of a membrane or a beam, the membrane maximum deflection, the number of loading cycles to failure.
A scheme for measuring the membrane properties is presented on Fig. 1.
For precise indenter positioning in NanoScan-3D both digital high-resolution optical microscope and the mode of the surface pre-scanning before the measurements are applied.
Application areas: MEMS, NEMS
* The hardness measurement method by instrumented indentation according to ISO14577
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| Fig. 1. A scheme for measuring the membrane properties . | Fig. 2. The loading / unloading curve: membrane free deflection area (a) membrane leaning on the substrate (b) |